Our achievements
Peer-reviewed journals, international and domestic conferences, and patents from the VDLab.
VDLab member · † equal contribution · * corresponding author
▶
In preparation & under review
(10)Area-selective ALD ZnO
Stacking fault of 2D material
Perovskite SAM
Cryogenic etching physics
ASALD with inhibitor
Strain engineering of MoS₂
Plasma etching for amorphous carbon layer
Plasma treated PR
WCx ALD
TMD growth nature
22
Chemistry of Materials, ACS · 2026 · Accepted
21
J. American Chemical Society, ACS · 2026 · Accepted
20
Advanced Functional Materials, Wiley · 2026 · Accepted
19
18
IEEE Electron Device Letters · 2026
17
16
Applied Surface Science · 2025
15
14
Materials & Design · 2025
13
J. Physics D: Applied Physics · 2023
Invited — special issue on “Data Driven Plasma Science”
12
J. Physics D: Applied Physics · 2023
Invited — special issue on “Data Driven Plasma Science”
11
Surfaces and Interfaces, Elsevier · 2022
10
Mechanics of Advanced Materials and Structures · 2022
9
Computational Materials Science, Elsevier · 2022
8
Applied Surface Science, Elsevier · 2022
7
6
5
Composites Part B: Engineering, Elsevier · 2018
4
3
Composites Part B: Engineering, Elsevier · 2017
2
Composites Science and Technology, Elsevier · 2017
1
Polymer, Elsevier · 2015
47
Atomistic Insights into Plasma-Material Interactions: Ion Bombardment Driven Crystallization and Pressure Dependent Radical Transportation
46th Int. Symposium on Dry Process (DPS) · 2025 46
A physics-based simulation framework for ion transport and surface interaction analysis in high-aspect ratio etching
78th Gaseous Electronics Conference (GEC) · 2025 45
Atomistic insights into plasma-material interactions in Al-doped TiO₂ via Molecular Dynamics
78th Gaseous Electronics Conference (GEC) · 2025 44
A Study on the Low-Temperature Etching Mechanism of SiO₂–SiN–SiO₂ Structure Layer Components Using NF₃/H₂ Plasma
78th Gaseous Electronics Conference (GEC) · 2025 43
Machine Learning-based Etch Rate Prediction Model in Plasma Dielectric Etching
78th Gaseous Electronics Conference (GEC) · 2025 42
Bridging Plasma Equipment and Surface Processes: Insights from Simulation and AI
78th Gaseous Electronics Conference (GEC) · 2025 · Invited 41
Substrate-Driven Selectivity in Area-Selective Atomic Layer Deposition of ZnO: A Theoretical Investigation
AVS 25th Int. Conference on ALD (ALD 2025) · 2025 40
A theoretical study for substrate-driven selectivity in area-selective ALD for ZnO as a bottomless barrier
IEEE Int. Interconnect Technology Conference (IITC) · 2025 39
Atomic-scale investigation of plasma-assisted crystallization and dopant redistribution in Al-doped TiO₂ via molecular dynamics
IEEE Int. Interconnect Technology Conference (IITC) · 2025 38
Multiscale Design for Semiconductor Manufacturing Process using Computational Science and Artificial Intelligence
ENGE 2024 37
Multiscale Design for Optimizing Semiconductor Processes using Computational Science and Artificial Intelligence
5th Int. Conference on Data-Driven Plasma Science (ICDDPS) · 2024 · Invited 36
Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
76th Gaseous Electronics Conference (GEC) · 2023 35
Influence of Surface Halogenation on Silane Adsorption onto Silicon Surfaces for Poly-Si Epitaxy: A DFT Study with Neural Network Potential
SISPAD 2023 34
Deep learning model for ion sputtering dynamics with molecular dynamics simulation
75th Gaseous Electronics Conference (GEC) · 2022 33
Plasma chamber design method combined with plasma deep learning model and optimization algorithm
75th Gaseous Electronics Conference (GEC) · 2022 32
Multiscale simulation on plasma-surface interaction: industrial plasma processing
22nd IEEE Int. Conference on Nanotechnology · 2022 31
Atomistic-scale Simulations on Surface Activation Process of Dielectric Oxides for Hybrid Bonding Applications
IEEE 23rd EPTC · 2021 30
Multiscale simulation on plasma-surface interaction: mitigation of leakage current at high-k metal oxide interface
74th Gaseous Electronics Conference (GEC) · 2021 ▶
SNU era · 2013–2019
(29) 29
Multiscale Approach to Local Crosslink Density Variation of Epoxy Nanocomposites with nanoparticle ICMAMS · 2019.10 · Nanjing, China
28
Effect of Copolymer Composition on Shape-Memory Polyurethane via Coarse-grained MD simulation USNCCM15 · 2019.07 · Austin, USA
27
Toward the multiscale modeling for the construction of cohesive zone model on the interface of laminated composite structure AIAA SciTech Forum · 2019.01 · San Diego, USA
26
Investigation of photo-mechanical behavior of azobenzene-based polymer: A coarse-grained MD study MMM 2018 · 2018.10 · Osaka, Japan
25
Thermomechanical behavior of shape-memory polyurethane copolymer: A coarse-grained MD simulation MMM 2018 · 2018.10 · Osaka, Japan
24
Study on viscoelastic behavior of natural rubber with multiscale approach MMM 2018 · 2018.10 · Osaka, Japan
23
Prediction of quasi-static yield stress of epoxy polymers using temperature accelerated MD simulations ICNN 5 · 2018.08 · Fukuoka, Japan
22
Multiscale analysis for the cohesive zone model on the interface of C/SiO₂ bi-layer ICNN 5 · 2018.08 · Fukuoka, Japan
21
Multiscale analysis of Photomechanics of Liquid Crystalline Polymer via Coarse-grained MD simulation WCCM XIII · 2018.07 · New York, USA
20
Prediction of Quasi-static Yield of Amorphous Epoxy Polymers Using Temperature Accelerated MD WCCM XIII · 2018.07 · New York, USA
19
Investigation on interfacial stress transfer of epoxy nanocomposites via multiscale approach WCCM XIII · 2018.07 · New York, USA
18
Multiscale approach for the construction of cohesive zone model on the interface of C/SiO₂ layer CDE 2018 · 2018.04 · Changwon, Korea
17
Coarse grained MD simulation of shape-memory behavior of segmented polyurethane copolymer CDE 2018 · 2018.04 · Changwon, Korea
16
Temperature-accelerated MD simulations of quasi-static yield stress of epoxy polymers AIAA SciTech Forum · 2018.01 · Florida, USA
15
Investigation on load transfer and deformation behavior of epoxy nanocomposites AIAA SciTech Forum · 2018.01 · Florida, USA
14
Multiscale study on load transfer of epoxy nanocomposites ICCM21 · 2017.08 · Xi’an, China
13
Elasto-plastic deformation mechanisms of thermoset glassy polymers depending on the structural characteristic of hardener: A MD study AIAA SciTech Forum · 2017.01 · Dallas, USA
12
The influence of crosslinking agents on the deformation mechanisms of thermosetting polymer: a MD study 8th MMM · 2016.10 · Dijon, France
11
Multiscale approach to characterize crosslinking-dependent interphase region of epoxy nanocomposites 8th MMM · 2016.10 · Dijon, France
10
Multiscale study for interphase characterization of epoxy nanocomposites with crosslink density WCCM XII & APCOM VI · 2016.07 · Seoul, Korea
09
Multiscale modeling to characterize interfacial behavior and interphase of crosslinked epoxy nanocomposites ASEM15 · 2015.08 · Incheon, Korea
08
Multiscale analysis on the toughening behavior of thermoplastic modified epoxy ASEM15 · 2015.08 · Incheon, Korea
07
Investigation on toughening behavior of thermoplastic modified epoxy ICCM 2015 · 2015.07 · Auckland, New Zealand
06
A molecular dynamics study on the strain rate dependence for elasto-plastic response of crosslinked epoxy ICCM20 · 2015.07 · Copenhagen, Denmark
05
A molecular dynamics study on toughening of thermoplastic modified epoxy ICCM 2014 · 2014.07 · Cambridge, UK
04
Characterization of interphase for cross-linked epoxy nanocomposites with a multiscale approach WCCM XI · 2014.07 · Barcelona, Spain
03
Multiscale modeling to characterize the thermomechanical properties of polymer nanocomposites for varying crosslink ratio ECCM16 · 2014.06 · Seville, Spain
02
Influence of crosslink ratio on the thermomechanical properties of polymer nanocomposites and interphase: a MD simulation AIAA SciTech 2014 · 2014.01 · National Harbor, USA
01
Effect of different crosslink densities on the thermomechanical properties of polymer nanocomposites AIMM13 · 2013.09 · Jeju, Korea
50
CNT의 액체 계면 정렬 거동에 대한 물리화학적 기작 연구
대한기계학회 창립 80주년 · 2025.12 49
Explainable AI 및 Machine Learning 기반 플라즈마 식각 공정 Etch Rate 예측
대한기계학회 창립 80주년 · 2025.12 48
웨이퍼 미세패턴 증착을 위한 직접모사 몬테카를로 기반 물질 전달 시뮬레이션
한국생산제조학회 추계 · 2025.12 47
고종횡비 식각의 이온 수송·에너지 전달 해석을 위한 AI 기반 하이브리드 시뮬레이션 프레임워크
한국생산제조학회 추계 · 2025.12 46
Mechanistic insight into PFAS adsorption/desorption on polyaniline
한국공업화학회 · 2025.11 45
CNT alignment using DLSA process: MD and DPD study
대한금속재료학회 · 2025.10 44
분자동역학 시뮬레이션을 활용한 이온 충돌에 따른 표면 구조 변화 메커니즘 해석
한국진공학회 · 2025.08 43
멀티스케일 모델링을 활용한 첨단 반도체 공정·장비 설계
한국멀티스케일역학회 심포지움 · 2025.07 · Invited 42
반도체 제조 공정에서의 CAE 방법론 활용
한국생산제조학회 춘계 · 2025.07 · Invited 41
Investigation of PFOA adsorption behavior on polyaniline
대한기계학회 CAE 춘계 · 2025.04 40
분자동역학 시뮬레이션을 활용한 플라즈마 후처리 공정의 원자 스케일 이해
대한기계학회 CAE 춘계 · 2025.04 39
Leveraging computational science for advanced semiconductor process design
대한기계학회 CAE 춘계 · 2025.04 · Invited 38
Multiscale investigation for semiconductor process design with computational science and AI
제32회 한국반도체학술대회 · 2025.02 · Invited 37
멀티스케일 전산모사를 통한 플라즈마 공정의 이해
대한기계학회 CAE 춘계 · 2024.05 ▶
SNU era · 2013–2019
(36) 36
Multiscale Approach on Thermoplastic and Thermosetting Polymer based on the Coarse-Grained Molecular Dynamics Simulation 한국전산구조공학회 학술심포지엄 · 2019.11
35
Study on Shape-memory polyurethane copolymer using Coarse-Grained Molecular Dynamics Simulation The 6th Korea Multi-Scale Mechanics Symposium · 2019.07
34
A combined coarse-grained molecular dynamics and finite element analysis on deformation of photo-responsive polymer KMSM 2018 Symposium · 2018.12
33
열가소성 플라스틱의 기계적 거동 예측을 위한 coarse-grained 모델 구축 대한기계학회 학술대회 · 2018.12
32
Coarse-grained model to predict mechanical behavior of thermoplastic polymer KMSM 2018 Symposium · 2018.12
31
분자 동역학을 이용한 에폭시 폴리머의 구성 방정식 예측 한국항공우주학회 추계학술대회 · 2018.11
30
멀티스케일 해석 기반의 이종재료 복합재의 계면 상 파괴 메커니즘 해석 모델 구축 대한기계학회 CAE 춘계학술대회 · 2018.04
29
온도가속화 분자동역학 전산해석을 통한 에폭시 폴리머의 구성방정식 예측 한국복합재료학회 춘계학술대회 · 2018.04
28
Influence of Molecular composition on Mechanical behavior of Shape memory Polyurethane Copolymer: A Coarse-grained Molecular Dynamics Simulation 한국전산역학회 학술대회 · 2018.02
27
Effects of structure of curing agent on the deformation mechanisms of epoxy polymers The 4th KMSM Multiscale & Multiphysics Mechanics Symposium · 2017.12
26
Multiscale approach to understand the interfacial stress transfer on epoxy nanocomposites The 4th KMSM Multiscale & Multiphysics Mechanics Symposium · 2017.12
25
축소 분자동역학 전산모사를 활용한 액정 고분자 광변형의 메조스케일 해석 대한기계학회 학술대회 · 2017.11
24
멀티스케일 모델링을 통한 에폭시 나노복합재의 하중전달 특성 규명 한국복합재료학회 춘계학술대회 · 2017.04
23
에폭시 폴리머의 반복 하중 거동에 대한 분자동역학 해석 한국복합재료학회 춘계학술대회 · 2017.04
22
가교제의 구조적 특성에 따른 열경화성 고분자소재의 미시적 변형 메커니즘에 대한 분자동역학 해석 한국전산역학회 학술대회 · 2017.02
21
The effect of the number of tube layers on interfacial characteristics of DWCNT/epoxy nanocomposite: A molecular modelling approach MMM’17 Symposium · 2017.01
20
에폭시 나노복합재의 하중전달 특성 규명을 위한 멀티스케일 해석 연구 대한기계학회 학술대회 · 2016.12
19
열경화성 고분자재료의 반복 하중에 따른 변형 메커니즘에 대한 분자동역학 시뮬레이션 한국복합재료학회 추계학술대회 · 2016.11
18
에폭시/이중벽 탄소나노튜브 나노복합재의 계면 상 강화효과에 따른 탄소나노튜브 벽 수가 미치는 영향에 대한 분석 전산구조공학회 학술심포지엄 · 2016.11
17
에폭시 나노복합재의 하중전달 특성에 대한 분자동역학 전산모사 연구 한국복합재료학회 춘계학술대회 · 2016.05
16
가교제의 구조적 특성에 따른 열경화성 고분자재료의 변형 메커니즘에 대한 분자동역학 시뮬레이션 한국복합재료학회 춘계학술대회 · 2016.05
15
에폭시 나노복합재의 가교율에 따른 계면의 하중전달 특성 한국전산구조공학회 정기학술대회 · 2016.04
14
에폭시/이중벽 탄소나노튜브의 기계적 성질에 대한 분자동역학 전산모사 대한기계학회 CAE 부문 · 2016.04
13
에폭시/이중벽 탄소나노튜브 나노복합재의 기계적 성질 분석 한국전산구조공학회 정기학술대회 · 2016.04
12
가교제에 따른 열경화성 에폭시 수지의 변형 메커니즘에 관한 분자동역학적 전산해석 한국전산구조공학회 정기학술대회 · 2016.04
11
에폭시/PES 복합소재의 인성 향상을 위한 멀티스케일 해석 대한기계학회 추계학술대회 · 2015.11
10
에폭시 수지의 강인화 기작에 대한 멀티스케일 해석 연구 한국복합재료학회 추계학술대회 · 2015.10
09
분자동역학 전산해석법을 통한 에폭시 고분자의 탄소성 변형 메커니즘 규명 한국복합재료학회 추계학술대회 · 2015.10
08
에폭시/이중벽 탄소나노튜브 나노복합재의 가교율에 따른 계면 상 강화 효과의 분자동역학적 해석 한국복합재료학회 추계학술대회 · 2015.10
07
에폭시/PES 복합소재의 인성 변화에 대한 분자동역학 해석 한국전산구조공학회 정기학술대회 · 2015.04
06
가교된 에폭시의 인장속도에 따른 탄소성 거동 변화의 분자동역학적 해석 한국전산구조공학회 정기학술대회 · 2015.04
05
Multiscale approach to understand the effect of crosslink MMM’14 Symposium, KSME · 2014.12
04
강인화된 에폭시 수지의 계면 특성에 대한 분자동역학 전산모사 연구 한국복합재료학회 추계학술대회 · 2014.11
03
가교율에 따른 고분자 나노복합재의 열탄성 거동 규명을 위한 멀티스케일 해석 연구 대한기계학회 학술대회 · 2013.12
02
가교율과 나노입자의 크기효과를 고려한 Epoxy/SiO₂ 복합소재의 기계적 물성 해석 한국복합재료학회 춘계학술대회 · 2013.05
01
가교율에 따른 에폭시 나노복합재의 기계적 물성 변화 해석 한국전산구조공학회 춘계학술대회 · 2013.04
03
US20240192604A1 · Published · 2024.06.13
02
US 11,869,751 B2 · Published · 2024.01.09
01
US 11,848,301 B2 · Published · 2023.12.19
★ FEATURED · Environmental Science & Technology, ACS · 2025
Polyaniline as an integrated amine-redox platform for reversible electrosorption and energy-efficient PFAS remediation: from molecular mechanisms to system integration
Highlights
▪ 재사용 가능한 전기흡착 기반으로 PFAS를 에너지 효율적으로 제거
▪ 폴리아닐린을 아민–레독스 통합 플랫폼으로 활용 — 분자 메커니즘부터 시스템 통합까지
▪ 전산·실험 융합 연구, 다수 언론 보도
Press & media
★ FEATURED · Int. J. Extreme Manufacturing · 2025
In-Situ Post-Doping Plasma Process during ALD of Al-Doped TiO₂ for Sub-Nanometer Lattice Ordering and Defect Annihilation
Highlights
▪ ALD 공정 중 in-situ 후도핑 플라즈마 공정 적용
▪ 서브나노미터 격자 정렬 및 결함 소멸 달성
▪ Al-doped TiO₂ 고품질 박막 구현
Press & media
★ FEATURED · J. Physics D: Applied Physics · 2023
Deep neural network-based reduced-order modeling of ion–surface interactions combined with molecular dynamics simulation
Invited — special issue on “Data Driven Plasma Science”
Highlights
▪ 이온–표면 상호작용을 심층신경망 기반 축소차수 모델(ROM)로 표현
▪ 분자동역학과 결합해 공정 시뮬레이션을 대폭 가속
▪ Data Driven Plasma Science 특집 초청 논문